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Vibration control for sensitive equipment


Scientist and researchers usually had some trouble into getting good results from some industry and laboratory sensitive equipment. For example, taking SEM images or moving things in a nanometric level could be a challenge if the site and environment where the equipment is, is not well suited for the task. Some industries that could be challenged by this are:

  • Medical Facilities;
  • Research;
  • Microelectronics;
  • Nanotechnology;
  • Bio and Pharmaceutical;
  • Research and Physics.

Vibrations are one of the main causes for the problems in the use of sensible equipment. They can come from different sources like a ground from an upper floor, building sway, other equipment’s and machinery working, street traffic and acoustic vibrations. From these different sources, the most important ones are related to the building where the equipment is and that’s why the building and the location of the equipment inside the building play a major role in its good results. There are some generic vibrations curves that were built based on real buildings of the semiconductor industry. The curves are guidelines for the building and floor design, according to the industry requirements.

According to the curves, for an office the vibration requirements let you work with a level of detail of 0,25mm. If you are designing a theatre, for example, the level of detail is 0,025mm. But for the industries stated above this level of detail is not enough for what they need. The thigh criteria that we have, according to the ISO curves, let you work with a level of detail of 0.1um or 0.0001mm.

The vibration control design needs to take special attention to all building elements, from the bottom to the top, and equipment’s attached or supported on it. To design for a VC-A curve or VC-C curve we can use only typical building structural elements but, in this case, the costs will increase with the increase in vibrations requirements. For the most demanding vibration classes, it’s difficult to achieve good results without vibration isolation add-ons like rubber pads, springs or active isolation systems.

Before installing the equipment in the building, a vibration test must be made to assure that all the requisites are satisfied.


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